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We investigated the chemical composition by means of the glow discharge optical emission spectroscopy (GD-OES) method. Chemical and Structure Analysis of the Surface Area Parameters of the IBAD modified samples (thickness of the carbon nanolayer, fluence of the nitrogen ions). The energy of the accelerated argon ions was 700вЂ‰eV, and the ion beam current density was 90 ОјA Prior to deposition, the samples in the vacuum chamber were cleaned by low-energy argon bombardment for 30вЂ‰min. The parameters of the deposition and ion implantation process are shown in Table 2. During the deposition and ion implantation process, the temperature of the sample was below 50вЊ. The acceleration voltage was 90вЂ‰kV, and the ion beam current density was about 1.5 ОјA In the second step, the coated substrates were irradiated with nitrogen ions. s в€’1, and the work pressure was about Pa.The deposition rate of the carbon nanolayers was about 0.15вЂ‰nm First, a carbon nanolayer was deposited by electron beam evaporation of a graphite tablet. The modifications were created in two steps. The temperature of the samples was measured by a thermocouple located in the sample holder.

The thickness of the nanolayers was monitored with a quartz monitor, and the ion beam current was measured using a Faraday cup. The samples were attached in a vacuum chamber to a water-cooled rotary manipulator. A scheme of the IBAD equipment used in the experiment is presented in our previous work. We used the method in which the modifications were created by sequential deposition and ion implantation. The modifications of the surface properties were performed by the IBAD method. The samples were ultrasonically cleaned in isopropyl alcohol before the preparation process.Д¬hemical composition of the Ti6Al4V titanium alloy (wt%). Final polishing was performed with 5 Ојm and 1 Ојm diamond paste.

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The disc samples (20вЂ‰mm in diameter and 6вЂ‰mm in thickness) were cut from a titanium alloy bar and were then ground with a series of waterproof abrasive papers up to 2000 grit. The chemical composition is shown in Table 1. The substrate material was a Ti6Al4V titanium alloy with an О± + ОІ phase microstructure. The aim was to investigate the effect of the deposition parameters on the penetration depth of the mixed and implanted atoms and on the surface properties. The parameters of the preparation process were proposed in such a way that the resulting model of the mixed area would have a decreasing concentration towards the substrate. Subsequent ion bombardment by nitrogen ions with energy 90вЂ‰keV was aimed at mixing the coating and substrate atoms and hardening the surface area. A carbon coating a few tens nanometers in thickness was applied to a Ti6Al4V alloy substrate. In our work, the ion beam assisted deposition (IBAD) method was chosen for modifying the surface properties of the titanium alloy. We therefore investigated various deposition techniques and the parameters of these techniques that influence not only the adhesion but also other properties of carbon-based layers. Due to the high internal stress, these coatings have low adhesion to many substrates.

It is known that carbon-based coatings can exhibit a very low coefficient of friction and that their application on a substrate may result in a multiple increase in its working life. Many methods and concepts for modifying the coating to reduce the coefficient of friction and the wear rate have been applied. The tribological properties of Ti6Al4V titanium alloy have received huge attention worldwide. However, the components of titanium alloys show unsatisfactory tribological properties. They are used in the aerospace industry and in biomedical engineering. Titanium and titanium alloys have many applications.

The increased nanohardness is attributed to the newly created phases that arose with ion implantation of nitrogen ions. We found that the modified samples had a markedly lower coefficient of friction even after damage to the carbon film, and they also had higher nanohardness than the unmodified samples. The nanohardness and the coefficient of friction were measured. The measured concentration profiles indicate the mixing of the carbon film into the substrate, which may have an effect on increasing the adhesion of the deposited film. We investigated the chemical composition by the glow discharge optical emission spectroscopy (GD-OES) method and the phases by the X-ray diffraction (XRD) method. These form a broad ion beam mixing area at the interface between the carbon film and the substrate. Nitrogen ions with energy 90вЂ‰keV were used. The ion beam assisted deposition (IBAD) method was chosen for preparing a carbon thin film with a mixing area on a substrate of Ti6Al4V titanium alloy.

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